Panel presentations for FPD manufacturing equipment | Web exhibition (FPDs, LCDs, touch panels, OLEDs)

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G8, G10 Coater for FPDsNext-generation photoresist coating system based on the Floating Coat System. Faster processing throughput compared to conventional spinless coaters, capable of handling larger substrates.

Spinless coater lineup
(Precision coaters for square substrates) Our impressive installed base achieves consistent processing performance. TOK's time-proven spinless coater can handle a wide range of substrate sizes.

TCS & TDOur line-up of cleaning systems, developers, and baking equipment. Integrate with our spinless coater for complete photolithography solutions.

Next-generation photoresist coating system based on the Floating Coat System. Faster processing throughput compared to conventional spinless coaters, capable of handling larger substrates.

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Tokyo Ohka Kogyo's Web Exhibition

Panel Presentations